למידע נוסף מאתר Aicat ליחצו כאן

Vacuum mass flow controllers are preconfigured to easily fit into vacuum processes.

These instruments measure and control gas flow from 0.5 SCCM to 5,000 SPM,

with accuracy to ±0.5% of reading or ±0.1% of full scale and a control range of

0.01-100% (10,000:1 turndown)